Application of Silicon Carbide Film in Low Emissivity Glass

In recent years, the low-e glass that can be tempered has been widely promoted in China, but the overall quality is not high enough because the existing low-e glass is not sufficiently resistant to mechanical scratching, and the high-temperature oxidation resistance is not strong enough. Due to the high cost of the product, it is urgent to solve the above problems.

In the area of large-area coated glass, the application of SiNx dielectric films has become more widespread. SiNx has good corrosion resistance, mechanical scratch resistance, and high temperature oxidation resistance. Therefore, SiNx is used as an outer protective layer, and the outer layer of the currently tempered low-e glass is also a SiNx material. The application of low emissivity glass to the market has made the application of low emissivity glass a wide range of applications. However, low-e glass is not widely used in civil construction. The important issue is low cost. Reducing the cost of low-e glass will become an important issue for popularizing low-e glass, and it will also become a hot topic for major float glass processing companies. The cost of Low-e glass is mainly due to the high production cost. An effective way to solve production costs is to increase production efficiency. At present, most companies increase the speed of the sheet glass in the coating machine and increase the power of the sputtering target to increase the efficiency and reduce the cost. When ensuring the thickness of the low-e glass film layer, the faster the sheet glass goes, the higher the power of the corresponding sputter target will be. The thickness of the dielectric layer SiNx in the low-e glass film layer is very thick. As the power of silicon-aluminum targets increases, the dross problem becomes more and more serious. The root cause is limited by the sputtering rate of silicon-aluminum targets.

Characteristics of Low-e glass

Low-emissivity glass has high transmittance to visible light in the wavelength range of 380~780nm, which is good for indoor lighting.It has high reflectance to solar near-infrared radiation with wavelength of 780~2500nm.It also has high reflectance for mid-to-infrared radiation, and it has the characteristics of low emissivity, that is, the radiant heat of the sheet glass on the low-radiation film surface is lower.